The Angstrom is an E-Beam and thermal evaporator based on an Angstrom Engineering EvoVac PVD platform. 

An evaporator is an instrument that produces thin film coatings of varied materials by heating the material till its starts to evaporate (transforms to its gas faze) by using an E-beam or thermal method. 

the E-beam method uses an electron beam that hits the material source causing atoms from the Source(crucible) to transform into a gaseous phase and precipitate into solid form, coating everything in the vacuum chamber with a thin layer of the material. 

In thermal evaporation, a boat, containing the source material, is heated electrically with a high current to make the material evaporate. 

This system is equipped with ion milling source to enable etching of the samples before or after coated. 

Available materials

• E-beam: Au, Cr, Ti, Ni, Al,Ag,Cu,Ge,Nb. 
• Thermal: Au,Ag. 
• The instrument contains eight–beam Materials and two thermals. 
• The current available materials are updated in the scheduling system. 

Features

• Automated process control.
• Load Lock with Automatic Transfer.
• 710 mm W × 500 mm D × 710 mm H: 6061-T6 aluminum high vacuum box chamber. 
• Base pressure of < 5E-8 Torr 
• 4 - inch diameter substrate carrier. 
• E-Beam evaporation source  
  • 8 × 7 cc Multi-Pocket Electron Beam Sel Sealing Source. 
  • 6 kW (10 kV - 600 mA) solid state power supply 
  • High deposition rate capability (0.1 - 40 Å/s) 
• Two thermal Evaporation Sources  
  • With a 2500 VA transformer at a scalable output voltage of up to 10V. 
• Ion milling source 
  • Ion energies of 100 to 1200 eV 
  • Ion current can exceed 100 mA 
  • Two grid ion optics assembly with 4 cm diameter pattern. 
  • Gas control with 2 MFCs (oxygen and argon) 
• QCM thickness sensors
• Variable Hight sample holder 
  • Variable 300 mm - 500 mm distance of sample from source.
  • 0 - 30 RPM adjustable continuous rotation
  • 4 - inch diameter substrate carrier
  • Water Cooling
• Variable Angle Deposition Stage 
  • ± 95° tilting capability
  •  40 RPM continuous sample rotation capability
  • Recipe software includes pre-made quick recipes patterns for zigzag, spiral & tree root growth as well as the flexibility to define your own custom motion.
  • Temperature control from ambient to 800 °C
  • Liquid Nitrogen Cooling. 
• CTI Cryo-Torr 10 high vacuum pump.