The Odem- High throughput KW E.B.Gun system is designed for electron beam and thermal deposition produced by Odem Scientific Applications Ltd.

Electron Beam Evaporation is a form of physical vapor deposition in which an electron beam bombards the target material causing local heating and evaporation. The electron beam causes atoms from the target to transform into the gaseous phase and precipitate into solid form, coating everything in the vacuum chamber with a thin layer of the anode material.

In thermal evaporation, a boat containing the source material is heated electrically with a high current to make the material evaporate. 

Features

• Materials: Ti, Cr, Au, Ni, Al, Ag.
• Telemark 244/246, 6 x 7cc, crucible electron beam source 
• Telemark, Model TT-6, 6 kW electron beam power supply 
• Glow Discharge Power Supply 800 Watt 
• Two thermal sources 2KW  
• Load Lock 
• SHI-APD CP8 UHV Cryo pump 
• Oxygen and Nitrogen lines are connected to the Load Lock and the chamber. 
• Water-cooled substrate holder for wafers up to 4" in diameter 
• Substrate holder which can tilt +-45 degrees 
• Substrate front heaters. Two 500 Watt (1kW total) halogen Emitters are installed, leading to a max temperature of 300°c.