Profilometry allows users to obtain a 2D trace of topographic features on a surface. 

The Profilometer is most frequently used to determine the film thickness, the channel depth of microfluidic devices, and the roughness of treated surfaces. 

The instrument has a vertical resolution in nanometers and a horizontal resolution as small as twenty nanometers. Programmable stylus force and scan speed allow measurements on various substrate materials. 

Features

• Measurement Technique Stylus profilometry (contact measurement) 
• Measurement Capability Two-dimensional surface profile measurements; 
• Optional three-dimensional measurement/analyses 
• Sample Viewing Digital magnification, 0.275 to 2.2 mm vertical FOV 
• Stylus Sensor Low Inertia Sensor (LIS 3) 
• Stylus Force 1 to 15 mg with LIS 3 sensor 
• Low Force Option N-Lite+ Low Force with 0.03 to 15 mg (optional) 
• Stylus Options Stylus radius options: 
  • 12.3µ 
  • 2µ 
  • 0.7µ 
  • Custom tips available upon request: 
  • Stylus radius options from 50 nm to 25 µm; High Aspect Ratio (HAR) tips 200 µm x 20 µm; 
    (Replacement by tech support)
• Custom tips available upon request 
• Sample X/Y Stage Manual 100 mm (4 in.) X/Y, manual leveling; 
• Motorized 150 mm (6 in.) X/Y, manual leveling 
• Sample R-Theta Stage Manual, continuous 360 degrees; 
• Software Vision64 Operation and Analysis Software; 
• Scan Length Range 55 mm (2 in.); 200 mm (8 in.) with scan stitching capability 
• Data Points Per Scan 120,000 maximum 
• Max. Sample Thickness 50 mm (1.95 in.) 
• Max. Wafer Size 200 mm (8 in.) 
• Step Height Repeatability <4Å, 1sigma on steps 5 μm 
• Vertical Range 1 mm (0.039 in.) 
• Vertical Resolution 1Å (@ 6.55 µm range)