Instrument Specification
Manufacturer: Jeol
The JEOL JSM-7000F Scanning Electron Microscope was stationed in the cleanroom to help users analyze their samples while keeping them in a clean environment. The JEOL JSM-7000F, equipped with a Schottky Field Emission Gun (FEG) filament, offers high resolution and large probe currents at small probe diameters permitting characterization of nano-scale structures.
The system has a multipurpose specimen chamber, motorized specimen stage and single-action specimen exchange. The system is equipped with additional features such as Energy Dispersive Spectroscopy (EDS), Electron Backscattered Diffraction (EBSD), and Elphy Quantum E-beam Lithography (EBL).
Features
- Resolution: 1.2nm (at 30kV), 3nm (at 1kV)
- 2 - 40 mm WD (working distance)
- Magnification: 10 to 19,000 (LM mode), 100 to 500,000 (SEM mode)
- Accelerating voltage: 0.5 to 30kV
- Specimen illumination current: 0.1 pA to 10 nA
- Electron gun: Schottky Field Emission.
- Alignment: Electromagnetic deflection system
- Objective lens: Strongly excited conical lens
- Specimen chamber: Large chamber for 200mm specimen
- EDS for materials identification
Location
Perlman building –1 floor, room 9 (White room)
Staff Contacts
-
Danielle Amit Awaskar
Research & Development Engineer
Training information
- 3 hours of basic training by supporting staff
- User practice with supporting group members or by staff (staff with consulting charge)
- When a user feels ready, he contacts the tool owner and passes the operation qualification test.