The Zeta™-300 is a fully integrated optical non-contact profiling microscope that provides 3D metrology and imaging capability in a compact, robust package. The system is powered by ZDot™ technology, which simultaneously collects high-resolution 3D data and a True Color infinite focus image. The Zeta-300 3D has a multi-Mod optics and easy-to-use software. 

Features

Multi-mode optics

• ZDot™: Proprietary 3D measurement technology combines innovative     optics with powerful algorithms to produce high resolution 3D     data on a variety of surfaces. 
• ZI: Phase and vertical scanning interferometry enable wide area measurements with high z resolution. 
• ZFT: An integrated broadband reflectometer measures film thickness and reflectance. 

Imaging

• 5MP color camera 
• Extensive suite of objectives and coupling lenses to measure an area as small as 45 x 35μm, up to 9.5 x 7.5mm without stitching 
• Image in brightfield, darkfield, or differential image contrast (DIC) modes 
• Automated Image stitching enables stitching of a array of adjacent images to generate a larger 3D image. The motorized XY stage automatically translates the sample to generate the adjacent images. Software assisted image alignment allows easy manual movement of the XY stage. The stitched image can be saved and analyzed like a normal Zeta image. 

Objectives

• 5X Std. Objective N.A.= 0.15 WD = 20.00 mm. 
• 20X Std. Objective N.A.= 0.45 WD = 3.10 mm. 
• 50X Std. Objective N.A.= 0.8 WD = 1.00 mm. 
• 100X Std. Objective N.A.= 0.90 WD = 1.00 mm. 
• X5 Interferometer Objective, N.A. = 0.15, WD = 10 mm. 
• X100 Interferometer Objective, N.A. = 0.80, WD = 1.0 mm. 

Illumination

• Broadband white light. 

Stage

• XY high precision motorized stage150 x 150mm. 
• High resolution Piezo Z Stage, 100μm travel, 0.2nm resolution. 
• Stage, Tip-Tilt, Manual, Fine, ±2°. 
• Chuck, Rotary, Manual, 360 deg.